• Ulvac will present plasma optical emission spectroscopy research at the 47th International Symposium on Dry Process in Tokyo, Nov. 19-20, 2026.
• The joint research with Institute of Science Tokyo examines methods for deriving electron temperature and density from optical emission measurements.
• The poster presentation is scheduled for Nov. 20, 4:30-6:30 p.m. JST, at Plaza Heisei, Tokyo International Exchange Center.

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